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Sample holder for xy-maps:
(automatic driven) - view more pictures

We designed a computer controlled sample holder for mapping inhomogeneous samples. The smallest programmable step is 0.5 micrometer whereas the maximum scan area is 100mm x 100mm. The data are recorded and stored in a file.

The results are displayed as ellipsometric x,y maps of the sample.

Ellipsometric x,y map of an inhomogeneous sample

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